Analysis of Miniature On-chip 3-d Inductor for Rf Circuits
نویسندگان
چکیده
In this paper, parametric analysis of miniature on-chip 3-D inductor is presented. The effect of conductor width, spacing between conductors and number of turns of inductor on Quality factor (Q-factor), inductance and Self-resonant frequency (SRF) are studied. Improvement in percentage increase of Q-factor is due to increase in conductor width. It can be found that ~72% of on-chip area reduction is observed when compared with conventional inductor design. Effective Qfactor and inductance are to be verified experimentally through dynamic variation of different parameters over the desired frequency range. The dimension of inductor considered for analysis is 100 μm ×100 μm, suitable for improved inductor design in high frequency RF circuits.
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